Semiconductor-on-Insulator

www.3dic.org/Semiconductor-on-Insulator

Semiconductor-on-Insulator refers to the technology by using a substrate having a buried insulator layer underneath the semiconductor layer. The advanced semiconductor-on-insulator substrates include silicon-on-insulator (SOI) like Si-on-SiO2, Si-on-SiN, Si-on-diamond, Si-on-AlN, and Si-on-Sapphire, SiGe-on-SiO2, Ge-on-SiO2, Ge-on-Al2O33, GaAs-on-SiO2, GaAs-on-Y2O3, InGaAs-on-Al2O3, InP-on-SiO2, InP-on-SiN, InP-on-Al2O3, GaSb-on-Al2O3, GeSn-on-SiO2, GaN-on-diamond, and SOI-/GaAs/Ge/GaN/Si substrates.

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