Waveguide

www.3dic.org/Waveguide




Types of Waveguides

Waveguide types.png
Types of waveguides.

Materials

Waveguide core material Waveguide type Wavelength Coupling Ref
SOI Rib waveguide [1]
a-Si:H (PECVD) [2]
Poly-Si
SiOx
Si3N4 (LPCVD) Ridge waveguide 1550 nm [3]
Si-rich SiNx
SiOxNy Buried channel waveguide [4]
Polymer (SU-8 2000.5) Ridge waveguide 1480 nm and 1550 nm Taper tip [3]
Polymer (siloxane-based) Ridge waveguide 1500 nm Taper tip [5]
Al2O3 Rib waveguide 1.48, 1.53, 1.55 and 1.61 µm [6]
AlN (Sputtering) [2]
TiO2

References

  1. R. A. Soref, J. Schmidtchen, and K. Petermann, “Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2,” IEEE Journal of Quantum Electronics, vol. 27, no. 8, pp. 1971–1974, Aug. 1991. Available: http://dx.doi.org/10.1109/3.83406
  2. 2.0 2.1 S. Zhu and G. Lo, “Vertically Stacked Multilayer Photonics on Bulk Silicon Toward Three-Dimensional Integration,” Journal of Lightwave Technology, vol. 34, no. 2, pp. 386–392, Jan. 2016. Available: http://dx.doi.org/10.1109/JLT.2015.2499761
  3. 3.0 3.1 J. Mu, M. A. Sefunc, B. Xu, M. Dijkstra, and S. M. García-Blanco, “Design and fabrication of adiabatic vertical couplers for hybrid integration by flip-chip bonding,” 2016, p. 975012. Available: http://dx.doi.org/10.1117/12.2212206
  4. K. Okazaki, H. Nishi, T. Tsuchizawa, T. Hiraki, Y. Ishikawa, K. Wada, T. Yamamoto, and K. Yamada, “Optical coupling between SiOxNy waveguide and Ge mesa structures for bulk-Si photonics platform,” in 2015 IEEE 12th International Conference on Group IV Photonics (GFP), 2015, pp. 122–123. Available: http://dx.doi.org/10.1109/Group4.2015.7305980
  5. R. Dangel, J. Hofrichter, F. Horst, D. Jubin, A. La Porta, N. Meier, I. M. Soganci, J. Weiss, and B. J. Offrein, “Polymer waveguides for electro-optical integration in data centers and high-performance computers,” Optics Express, vol. 23, no. 4, p. 4736, Feb. 2015. Available: http://dx.doi.org/10.1364/OE.23.004736
  6. A. Özden, M. Demirtas, and F. Ay, “Polarization insensitive single mode Al2O3 rib waveguide design for applications in active and passive optical waveguides,” Journal of the European Optical Society: Rapid Publications, vol. 10, Jan. 2015. Available: http://dx.doi.org/10.2971/jeos.2015.15005